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New fabrication process of the SOI-based miniature electric field sensor 期刊论文
刘伟,杨鹏飞,彭春荣,方东明,夏善红, 2013, 卷号: 34, 期号: 8, 页码: 086005-1
刘伟,杨鹏飞,彭春荣,方东明,夏善红
收藏  |  浏览/下载:5/0  |  提交时间:2014/04/14
Localized Si–Au eutectic bonding around sunken pad for fabrication of a capacitive absolute pressure sensor 期刊论文
Sensors and Actuators A: Physical, 2013, 卷号: 201, 期号: ?, 页码: 241
刘启民,杜利东,赵湛,肖丽,孙学金
收藏  |  浏览/下载:6/0  |  提交时间:2014/04/15
Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes 期刊论文
J. Micromech. Microeng, 2013, 卷号: 23, 期号: 5, 页码: 55002
杨鹏飞,彭春荣,方东明,闻小龙,夏善红
收藏  |  浏览/下载:10/0  |  提交时间:2014/04/15
Fabrication and characterization of microelectromechanical systems-based gas chromatography column with embedded micro-posts for separation of environmental carcinogens 期刊论文
Journal of Electronics (China), 2013, 卷号: 30, 期号: 3, 页码: 313
董甜,佟建华,边超,赵玲,何秀丽,夏善红
收藏  |  浏览/下载:11/0  |  提交时间:2014/04/15
Fabrication and characterization of a double-heater based MEMS thermal flow sensor 期刊论文
Sensors and Actuators A: Physical, 2013, 卷号: 15, 期号: 193, 页码: 25
孙建海,崔大付,张璐璐
收藏  |  浏览/下载:7/0  |  提交时间:2014/04/15
Fabrication and characterization of SnO2 nano-spheres for hydrogen detection 期刊论文
Journal of Nanoengineering and Nanosystems, 2013, 卷号: 227, 期号: 3, 页码: 125
刘西锋,董汉鹏,边超,佟建华,孙楫舟,何秀丽,夏善红
收藏  |  浏览/下载:21/0  |  提交时间:2014/04/14
Design and Fabrication of a Novel Closed-loop SOI MEMS Resonant Electrostatic Field Sensor 会议论文
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology(APCOT2010), 澳大利亚, 2010-07-06
彭春荣; 杨鹏飞; 张海岩
收藏  |  浏览/下载:15/0  |  提交时间:2011/06/03
Fabrication and Characterization of Cobalt Nanostructure-based Microelectrodes for Phosphate Detection 会议论文
2nd International Conference of the Chnese Society of Micro/Nano Technology, 中国, 2010-10-22
白银; 佟建华; 边超
收藏  |  浏览/下载:13/0  |  提交时间:2011/06/03
Antibody immobilization based on nano spheres containing mixed SAMs and SPA for HbA1c Immuno-FET fabrication 会议论文
2nd International Conference of the Chnese Society of Micro/Nano Technology, 中国, 2010-10-22
薛茜男; 边超; 佟建华
收藏  |  浏览/下载:11/0  |  提交时间:2011/06/03
Fabrication and H2S Sensing Properties of CuO/SnO2 Heterojunctions Based on Porous Electrospun Fibers 会议论文
The 13th International Meeting on Chemical Sensors, 澳大利亚, 2010-07-11
赵燕; 何秀丽; 李建平
收藏  |  浏览/下载:13/0  |  提交时间:2011/06/03


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