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Birefringent response of graphene oxide film structurized via femtosecond laser 期刊论文
Nano Research, 2022, 卷号: 15, 期号: 5, 页码: 4490-4499
作者:  T. Zou;  B. Zhao;  W. Xin;  F. Wang;  H. Xie
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Maskless laser nano-lithography of glass through sequential activation of multi-threshold ablation 期刊论文
Applied Physics Letters, 2019, 卷号: 114, 期号: 13, 页码: 5
作者:  Y.Z.He;  J.H.Zhang;  S.Singh;  E.Garcell;  A.Y.Vorobyev
收藏  |  浏览/下载：0/0  |  提交时间：2020/08/24
Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status 期刊论文
Applied Mathematical Modelling, 2019, 卷号: 74, 页码: 621-640
作者:  Y.Deng;  Z.Liu;  Y.Wang;  H.Duan;  J.G.Korvink
收藏  |  浏览/下载：1/0  |  提交时间：2020/08/24
Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
收藏  |  浏览/下载：11/0  |  提交时间：2018/06/13
Improvement of radiation measurement precision for target by using atmosphere-corrected coefficients 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 8
作者:  Guo, L.-H.;  H.-Z. Guo;  C.-Y. Yang and N. Li
收藏  |  浏览/下载：22/0  |  提交时间：2017/09/11
曲面微纳结构的静电诱导成形原理与工艺研究 学位论文
博士: 中国科学院大学, 2015
作者:  李和福
收藏  |  浏览/下载：68/0  |  提交时间：2015/11/30
A novel method for fabricating curved frequency selective surface via 3D printing technology 会议论文
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, IPTA 2014, May 13, 2014 - May 15, 2014, Beijing, China
Fengchao L.; Jinsong G.
收藏  |  浏览/下载：28/0  |  提交时间：2015/04/27
Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE) 会议论文
2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010, Guangzhou, China
Zhang Y.; Jin C.; Lu Z.
收藏  |  浏览/下载：8/0  |  提交时间：2013/03/25
In order to improve the measuring accuracy of the visible light phase-shifting point diffraction interferometer (PS/PDI) for the extreme ultraviolet lithography (EUVL) aspheric mirrors  the main measuring errors will be discussed in this paper. At first  the elementary configuration and measuring principle of the visible light phase-shifting point diffraction interferometer are introduced briefly  then the different errors which are possible to affect the measuring result are summed up  the errors include PZT phase-shifting error  detector nonlinearity error  detector quantization error  wavelength instability error and intensity instability error of the laser source  vibration error  air refractivity instability error and so on. Through detailed analysis and simulation  the magnitude of these errors can be obtained. By analysing the reasons which cause these errors and the relationship between these errors and interferometer configuration parameters  some methods are put forward to avoid or restrain these errors accordingly.  
Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L.
收藏  |  浏览/下载：18/0  |  提交时间：2013/03/25
Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer  for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS  an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively  valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed  acceleration and viscosity of the photoresist. After development  the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate  the film thickness error was within 1%  and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater  which contributes to quality improvement of laser direct writing lines on CSS.  

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