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Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper 期刊论文
APPLIED SURFACE SCIENCE, 2011, 卷号: 258, 期号: 3, 页码: 1217-1224
Zhang,L; Wang,HB; Zhang,ZF; Qin,F; Liu,WL; Song,ZT
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