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FABRICATION OF BIFOCAL MICROLENSES ON INP AND SI BY AR ION-BEAM ETCHING 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 卷号: 96, 期号: 1-2, 页码: 401-404
REN,CX; XIAO,DY; CHEN,GL; LIU,XH; Zou,SC
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