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PROPERTIES AND STRUCTURE OF SILICON-NITRIDE FILMS SYNTHESIZED BY ION-BEAM-ENHANCED DEPOSITION 期刊论文
SURFACE & COATINGS TECHNOLOGY, 1991, 卷号: 46, 期号: 2, 页码: 227-232
LIU, XH; YU, YH; ZHENG, ZH; HUANG, W; Zou, SC(邹世昌); JIN, ZQ; CHANG, M; XU, SL; TANIGUCHI, S; SHIBATA, T; NAKAMURA, K
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