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Investigation of the hydrogenation properties of Zr films under unclean plasma conditions 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 卷号: 20, 页码: 1840-1845
作者:  Shi, LQ;  Yan, GQ;  Zhou, JY;  Luo, SZ;  Peng, SM
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