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浏览/检索结果: 共4条，第1-4条 帮助 限定条件 发表日期：1999     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Silicon-glass wafer bonding with silicon hydrophilic fusion bonding technology 期刊论文 sensors and actuators a physical, 1999 Xiao, ZX; Wu, GY; Li, ZH; Zhang, CB; Hao, YL; Wang, YY 收藏  |  浏览/下载：1/0  |  提交时间：2015/11/10 silicon  glass  hydrophilic fusion bonding technology  DIFFUSION   Silicon micro-accelerometer with rug resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process 期刊论文 sensors and actuators a physical, 1999 Xiao, Z; Chen, M; Wu, GY; Zhao, CG; Zhang, DC; Hao, YL; Zhang, GB; Li, ZH 收藏  |  浏览/下载：5/0  |  提交时间：2015/11/11 micro-accelerometer  inductively coupled plasma  two mask bulk process  CAPACITIVE ACCELEROMETER  SENSORS  CIRCUIT   The characteristics of point-heating excitation in silicon micro-mechanical resonators 期刊论文 SENSORS AND ACTUATORS A-PHYSICAL, 1999, 卷号: 77, 期号: 3, 页码: 187-190 Yu, H; Wang, YL; Ding, C; Wang, YQ; Xu, YG 收藏  |  浏览/下载：8/0  |  提交时间：2012/03/25 SENSOR   Multiple quantum well self electro-optic effect devices for optoelectronic smart pixels 会议论文 conference on optoelectronic integrated circuits and packaging iii, san jose, ca, jan 28-29, 1999 Chen HD; Wu RG; Chen ZB; Zhang Y; Du Y; Zeng QM; Li XJ; Zhang YM; Zhou G; Hua F 收藏  |  浏览/下载：16/0  |  提交时间：2010/10/29 SEED arrays  smart pixels  hybrid integration  optical interconnects  VLSI SWITCHING CHIP  MQW MODULATORS  SILICON CMOS  CIRCUITS  ARRAYS  OPERATION  DETECTORS  RECEIVERS  PROGRESS