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THE DEPTH PROFILE OF HIGH-DOSE LOW-MASS IONS IMPLANTED INTO HIGHER MASS SUBSTRATE BY RBS ANALYSIS 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 卷号: 191, 期号: 1-3, 页码: #REF!
作者:  YIN, SD;  ZHANG, JP;  GU, Q;  LIU, SJ;  XIE, BZ
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