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Probing process-induced defects in Si using infrared photoelastic stress measurement technique (EI收录) 会议论文
Materials Research Society Symposium Proceedings, San Francisco, CA, United states, March 28, 2005 - April 1, 2005
作者:  Liu, X.H.[1,3];  Wong, S.P.[1,3];  Peng, H.J.[1];  Ke, N.[1,3];  Zhao, Shounan[2]
收藏  |  浏览/下载:3/0  |  提交时间:2019/04/18
Stress distribution in ultra thin SiO2 film/Si substrate system measured by a low level birefringence detection technique (EI收录) 会议论文
Materials Research Society Symposium Proceedings, San Francisco, CA, United states, April 13, 2004 - April 16, 2004
作者:  Liu, X.H.[1];  Peng, H.J.[1];  Wong, S.P.[1];  Zhao, Shounan[2]
收藏  |  浏览/下载:1/0  |  提交时间:2019/04/18
Low level birefringence detection system for stress measurement in semiconductors (EI收录) 会议论文
Proceedings of SPIE - The International Society for Optical Engineering, Munich, Germany, June 23, 2003 - June 26, 2003
作者:  Peng, H.J.[1];  Wong, S.P.[1];  Liu, X.H.[1];  Lai, Y.W.[1];  Ho, H.P.[1]
收藏  |  浏览/下载:4/0  |  提交时间:2019/04/19


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