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上海光学精密机械研... [12]
内容类型
期刊论文 [10]
会议论文 [2]
发表日期
2015 [1]
2014 [6]
2013 [3]
2012 [2]
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In situ aberration measurement method using a phase-shift ring mask
期刊论文
j. micro-nanolithogr. mems moems, 2015, 卷号: 14, 期号: 1, 页码: 11005
作者:
Li, Sikun
;
Wang, Xiangzhao
;
Yang, Jishuo
;
Duan, Lifeng
;
Tang, Feng
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2016/11/28
Aberration measurement based on principal component analysis of aerial images of optimized marks
期刊论文
opt. commun., 2014, 卷号: 329, 页码: 63
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2016/11/28
Aberration measurement
Principal component analysis
Optimized marks
Aerial image
Aberration measurement technique based on an analytical linear model of a through-focus aerial image
期刊论文
opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2016/11/28
NIJBOER-ZERNIKE APPROACH
POINT-SPREAD FUNCTIONS
PHASE-SHIFTING MASK
LITHOGRAPHIC TOOLS
PROJECTION OPTICS
COMA MEASUREMENT
ILLUMINATION
COMPUTATION
In situ aberration measurement method using a phase-shift ring mask
会议论文
27th optical microlithography conference as part of the spie advanced lithography symposium
作者:
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Tang, Feng
;
Yan, Guanyong
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2016/11/28
Aberration measurement based on principal component analysis of aerial images of optimized marks
期刊论文
opt. commun., 2014, 卷号: 329, 页码: 63
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2016/11/28
Aberration measurement
Principal component analysis
Optimized marks
Aerial image
A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask
会议论文
27th optical microlithography conference as part of the spie advanced lithography symposium
作者:
Li, Sikun
;
Wang, Xiangzhao
;
Yang, Jishuo
;
Tang, Feng
;
Yan, Guanyong
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2016/11/28
Aberration measurement technique based on an analytical linear model of a through-focus aerial image
期刊论文
opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2016/11/28
NIJBOER-ZERNIKE APPROACH
POINT-SPREAD FUNCTIONS
PHASE-SHIFTING MASK
LITHOGRAPHIC TOOLS
PROJECTION OPTICS
COMA MEASUREMENT
ILLUMINATION
COMPUTATION
Adaptive denoising method to improve aberration measurement performance
期刊论文
opt. commun., 2013, 卷号: 308, 页码: 228
作者:
Yang, Jishuo
;
Wang, Xiangzhao
;
Li, Sikun
;
Duan, Lifeng
;
Bourov, Anatoly Y.
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2016/11/28
In situ aberration measurement technique based on an aerial image with an optimized source
期刊论文
opt. eng., 2013, 卷号: 52, 期号: 6, 页码: 63602
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2016/11/28
High-order aberration measurement technique based on a quadratic Zernike model with optimized source
期刊论文
opt. eng., 2013, 卷号: 52, 期号: 5, 页码: 53603
作者:
Yang, Jishuo
;
Wang, Xiangzhao
;
Li, Sikun
;
Duan, Lifeng
;
Yan, Guanyong
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2016/11/28
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