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浏览/检索结果: 共14条，第1-10条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Grating-based precision measurement system for five-dimensional measurement 期刊论文 Chinese Optics, 2020, 卷号: 13, 期号: 1, 页码: 189-202 作者:  Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li 收藏  |  浏览/下载：2/0  |  提交时间：2021/07/06 Heterodyne period measurement in a scanning beam interference lithography system 期刊论文 Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836 作者:  S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig 收藏  |  浏览/下载：3/0  |  提交时间：2021/07/06 Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1 作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang 收藏  |  浏览/下载：16/0  |  提交时间：2018/06/13 Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7 作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li 收藏  |  浏览/下载：19/0  |  提交时间：2018/06/13 Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文 Applied Optics, 2017, 卷号: 56, 期号: 31 作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang 收藏  |  浏览/下载：13/0  |  提交时间：2018/06/13 Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文 Scientific Reports, 2017, 卷号: 7 作者:  Liu, Z. W.;  W. H. Li;  Bayanheshig;  X. T. Li;  S. Jiang 收藏  |  浏览/下载：17/0  |  提交时间：2018/06/13 Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9 作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig 收藏  |  浏览/下载：13/0  |  提交时间：2018/06/13 Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5 作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi 收藏  |  浏览/下载：13/0  |  提交时间：2018/06/13 Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文 Optics Express, 2017, 卷号: 25, 期号: 9 作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig 收藏  |  浏览/下载：53/0  |  提交时间：2018/06/13 Moire alignment algorithm for an aberration-corrected holographic grating exposure system and error analysis 期刊论文 Applied Optics, 2016, 卷号: 55, 期号: 31 作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  Y. Song 收藏  |  浏览/下载：12/0  |  提交时间：2017/09/11