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Tailoring femtosecond 1.5-mu m Bessel beams for manufacturing high-aspect-ratio through-silicon vias 期刊论文
Sci Rep, 2017, 卷号: 7
作者:  Zhou, Changhe;  Sugioka, Koji;  Cheng, Ya;  Chu, Wei;  Tan, Yuanxin
收藏  |  浏览/下载:24/0  |  提交时间:2017/12/25
Tailoring femtosecond 1.5-mu m Bessel beams for manufacturing high-aspect-ratio through-silicon vias 期刊论文
Sci Rep, 2017, 卷号: 7
作者:  He, Fei;  Yu, Junjie;  Tan, Yuanxin;  Chu, Wei;  Zhou, Changhe
收藏  |  浏览/下载:21/0  |  提交时间:2017/12/25
Tailored femtosecond Bessel beams for high-throughput, taper-free through-Silicon vias (TSVs) fabrication 会议论文
作者:  He, Fei;  Yu, Junjie;  Chu, Wei;  Wang, Zhaohui;  Tan, Yuanxin
收藏  |  浏览/下载:14/0  |  提交时间:2017/12/25
High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation 期刊论文
optica, 2015, 卷号: 2, 期号: 4, 页码: 329
作者:  Liao, Yang;  Ni, Jielei;  Qiao, Lingling;  Huang, Min;  Bellouard, Yves
收藏  |  浏览/下载:22/0  |  提交时间:2016/11/28
Formation of in-volume nanogratings with sub-100-nm periods in glass by femtosecond laser irradiation 期刊论文
opt. lett., 2015, 卷号: 40, 期号: 15, 页码: 3623
作者:  Liao, Yang;  Pan, Wangjun;  Cui, Yun;  Qiao, Lingling;  Bellouard, Yves
收藏  |  浏览/下载:17/0  |  提交时间:2016/11/28
Formation of nanogratings in a porous glass immersed in water by femtosecond laser irradiation 会议论文
conference on laser applications in microelectronic and optoelectronic manufacturing (lamom) xx
作者:  Liao, Yang;  Ni, Jielei;  Qiao, Lingling;  Huang, Min;  Bellouard, Yves
收藏  |  浏览/下载:15/0  |  提交时间:2016/11/28
Threshold effect in femtosecond laser induced nanograting formation in glass: Influence of the pulse duration 期刊论文
Applied Physics A: Materials Science and Processing, 2014, 卷号: 114, 期号: 1, 页码: 223-230
作者:  Liao Y(廖洋);  Zeng, Bin;  Qiao, Lingling;  Liu LQ(刘连庆);  Sugioka, Koji
收藏  |  浏览/下载:24/0  |  提交时间:2014/04/16
Fabrication of optical microcavities with femtosecond laser pulses 会议论文
conference on laser resonators, microresonators, and beam control xvi
作者:  Lin, Jintian;  Song, Jiangxin;  Tang, Jialei;  Fang, Wei;  Sugioka, Koji
收藏  |  浏览/下载:19/0  |  提交时间:2016/11/28
Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining 期刊论文
opt. express, 2014, 卷号: 22, 期号: 12, 页码: 14792
作者:  Song, Jiangxin;  Lin, Jintian;  Tang, Jialei;  Liao, Yang;  He, Fei
收藏  |  浏览/下载:49/0  |  提交时间:2016/11/28
Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips 会议论文
conference on laser applications in microelectronic and optoelectronic manufacturing (lamom) xix
作者:  Cheng, Ya;  Liao, Yang;  Sugioka, Koji
收藏  |  浏览/下载:18/0  |  提交时间:2016/11/28


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