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浏览/检索结果: 共1条，第1-1条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE) 会议论文 Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004, Beijing, China Sun D.; Dong W.; Guo W.; Liu C.; Wang G.; Yan X.; Xu B.; Chen W. 收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25 The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory  the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length  width and thickness of the torsion beam are 700  12 and 10 m  length and width of the cantilever beam are 1900 and 1000 m  length and width of the balance beam are 100 and 1000 m  shortest spacing between the upper and lower electrodes is 0.05 m  and highness of the lower electrode is 55 m  respectively. The actuating voltage is less than 10 V  and the switching time of Ton and Toff are 1.30ms and 1.25ms  respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.