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科研机构
西安交通大学 [8]
上海硅酸盐研究所 [1]
内容类型
期刊论文 [8]
会议论文 [1]
发表日期
2018 [1]
2013 [5]
2012 [2]
2010 [1]
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Pore filling behavior of YSZ under CMAS attack: Implications for designing corrosion-resistant thermal barrier coatings
期刊论文
Journal of the American Ceramic Society, 2018, 卷号: 101, 期号: 12, 页码: 5756-5770
作者:
Shan, Xiao
;
Luo, Lirong
;
Chen, Wenfu
;
Zou, Zhonghua
;
Guo, Fangwei
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/12/28
Visualization of resist flow fields in microlithography by using defocusing digital particle image velocimetry
期刊论文
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2013, 卷号: 12, 期号: [db:dc_citation_issue]
作者:
Du Jun
;
Wei Zhengying
;
Li Shize
;
Tang Yiping
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/03
defocusing digital particle image velocimetry
micro/nanolithography
resist filling behavior
Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics simulation and defocusing digital particle image velocimetry
期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 卷号: 31, 期号: [db:dc_citation_issue]
作者:
Du, Jun
;
Wei, Zhengying
;
Li, Shize
;
Tang, Yiping
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/03
Visualization experimental research on resist three-dimensional microflow fields in microlithography
期刊论文
Zhejiang Daxue Xuebao (Gongxue Ban)/Journal of Zhejiang University (Engineering Science), 2013, 卷号: 47, 期号: [db:dc_citation_issue], 页码: 1871-1876
作者:
Du, Jun
;
Wei, Zheng-Ying
;
He, Wei
;
Geng, Qi
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/03
Defocusing digital particle image velocimetry
Experimental research
Filling behavior
Micro/nanolithography
Resist
Three-dimensional particle tracking velocimetry (3D- PTV)
Three-dimensional velocity fields
Threedimensional (3-d)
Resist filling behavior in microimprint
期刊论文
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2013, 卷号: 47, 期号: [db:dc_citation_issue], 页码: 126-133
作者:
Li, Shize
;
Wei, Zhengying
;
Du, Jun
;
Tang, Yiping
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/10
Defocusing digital particle image velocimetry
Evolution direction
Experimental errors
Microimprint
Motion trajectories
Particle tracking velocimetry
Visualization experiment
Visualization research
Experimental research on resist filling behavior in microimprint lithography by using defocusing digital particle image velocimetry
期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 卷号: 19, 期号: [db:dc_citation_issue], 页码: 1229-1238
作者:
Du Jun
;
Wei Zhengying
;
Li Shize
;
Tang Yiping
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/10
Numerical Simulation and Experimental Study on Resist Filling Behavior in UV-nanoimprint Lithography
会议论文
作者:
Du, J.
;
Wei, Z.
;
Tang, Y.
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/10
Defocusing digital particle image velocimetry
Filling behavior
NIL
Effects of Mold Geometries and Initial Resist Thickness on Filling Behavior in UV-Nanoimprint Lithography
期刊论文
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2012, 卷号: 9, 期号: [db:dc_citation_issue], 页码: 1029-1035
作者:
Du, Jun
;
Wei, Zhengying
;
He, Wei
;
Tang, Yiping
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/10
Filling Mode
Nanoimprint Lithography
Initial Resist Thickness
Filling Behavior
Duty Ratio
Flow behavior of resist in room-temperature micro-imprinting and its process optimization
期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2010, 卷号: 18, 期号: [db:dc_citation_issue], 页码: 1822-1832
作者:
Wei, Zheng-Ying
;
Xiong, Xiao-Dong
;
Du, Jun
;
Ding, Yu-Cheng
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/10
Duty ratios
Filling rate
Fluid solid interaction
Imprinting process
Residual thickness
Room-temperature micro-imprinting
Technological conditions
Visual experiments
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