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Fabrication of ultra-deep high- aspect- ratio isolation trench without void and its application 其他
2010-01-01
Qian, Liang; Wang, Jia; Yang, Zhenchuan; Yan, Guizhen
收藏  |  浏览/下载:1/0  |  提交时间:2015/11/13
A New Isolation Technology for Automotive Power-Integrated-Circuit Applications 期刊论文
ieee电子器件汇刊, 2009
Sun, Jingmeng; Jiang, Frank X. C.; Guan, Lingpeng; Xiong, Zhibin; Yan, Guizhen; Sin, Johnny K. O.
收藏  |  浏览/下载:4/0  |  提交时间:2015/11/12
Monolithic Integration of Bulk micro-machined Capacitive Accelerometer and Signal Conditioning Circuit 其他
2008-01-01
Qian, Liang; Wang, Jia; Yang, Zhengchuan; Yan, Guizhen
收藏  |  浏览/下载:1/0  |  提交时间:2015/11/10
Effective crosstalk isolation with post-CMOS selectively grown porous silicon technique for radio frequency system-on-chip (SOC) applications 期刊论文
ieee electron device letters, 2008
Li, Chen; Liao, Huailin; Wang, Chuan; Huang, Ru; Wang, Yangyuan
收藏  |  浏览/下载:3/0  |  提交时间:2015/11/10
Fabrication of ultra deep electrical isolation trenches with high aspect ratio using DRIE and dielectric refill 期刊论文
pan tao ti hsueh paochinese journal of semiconductors, 2005
Zhu, Yong; Yan, Guizhen; Wang, Chengwei; Yang, Zhenchuan; Fan, Jie; Zhou, Jian; Wang, Yangyuan
收藏  |  浏览/下载:1/0  |  提交时间:2015/11/16
用深反应离子刻蚀和介质填充技术制造具有高深宽比的超深电隔离槽 期刊论文
半导体学报, 2005
朱泳; 闫桂珍; 王成伟; 杨振川; 范杰; 周健; 王阳元
收藏  |  浏览/下载:1/0  |  提交时间:2015/11/12
Fabrication of keyhole-free ultra-deep high-aspect-ratio isolation trench and its applications 期刊论文
journal of micromechanics and microengineering, 2005
Zhu, Y; Yan, GZ; Fan, J; Zhou, J; Liu, XS; Li, ZH; Wang, YY
收藏  |  浏览/下载:1/0  |  提交时间:2015/11/13
Post-CMOS process for high-aspect-ratio monolithically integrated single crystal silicon microstructures 其他
2005-01-01
Zhu, Y; Yan, GZ; Fan, J; Liu, XS; Zhou, J; Wang, YY
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/13
Post-CMOS process for high-aspect-ratio monolithically integrated single crystal silicon microstructures 其他
2005-01-01
Zhu, Yong; Yan, Guizhen; Fan, Jie; Liu, Xuesong; Zhou, Jian; Wang, Yang Yuan
收藏  |  浏览/下载:4/0  |  提交时间:2015/11/13
Fabrication of ultra deep high aspect ratio electrical isolation trenches using DRIE and dielectric refill 其他
2004-01-01
Zhu, Y; Yang, GZ; Wang, CW; Yang, ZC; Fan, J; Zhou, J; Wang, YY
收藏  |  浏览/下载:4/0  |  提交时间:2015/11/13


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