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A New Prewetting Process of Through Silicon Vias (TSV) Electroplating for 3D Integration 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 卷号: 28, 期号: 3
作者:  Li, Cao;  Nie, Jun;  Zou, Jinglong;  Liu, Sheng;  Zheng, Huai
收藏  |  浏览/下载:10/0  |  提交时间:2019/12/05
Study of Annular Copper-Filled TSVs of Sensor and Interposer Chips for 3-D Integration 期刊论文
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2019, 卷号: 9, 期号: 3
作者:  Li, Cao;  Zou, Jinglong;  Liu, Sheng;  Zheng, Huai;  Fei, Peng
收藏  |  浏览/下载:6/0  |  提交时间:2019/12/05
Effect of Reverse Pulse on Additives Adsorption and Copper Filling for Through Silicon Via 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2018, 卷号: 166, 期号: 1, 页码: D3006-D3012
作者:  Zhu, QS;  Zhang, X;  Liu, CZ;  Liu, HY
收藏  |  浏览/下载:18/0  |  提交时间:2018/12/25
Effect of Reverse Pulse on Additives Adsorption and Copper Filling for Through Silicon Via 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2018, 卷号: 166, 期号: 1, 页码: D3006-D3012
作者:  Zhu, Q. S.;  Zhang, X.;  Liu, C. Z.;  Liu, H. Y.
收藏  |  浏览/下载:0/0  |  提交时间:2021/02/02
Effect of ultrasound on copper filling of high aspect ratio through-silicon via (TSV) 期刊论文
Journal of the Electrochemical Society, 2017, 卷号: 164, 期号: 4, 页码: D126-D129
作者:  Xiao, Hongbin;  Wang, Fuliang*;  Wang, Yan;  He, Hu;  Zhu, Wenhui
收藏  |  浏览/下载:8/0  |  提交时间:2019/12/03
Numerical modeling and experimental verification of copper electrodeposition for through silicon via (TSV) with additives 期刊论文
Microelectronic Engineering, 2017, 卷号: 170, 期号: Volume 170, 页码: 54-58
作者:  Xiao, Hongbin;  He, Hu;  Ren, Xinyu;  Zeng, Peng;  Wang, Fuliang*
收藏  |  浏览/下载:5/0  |  提交时间:2019/12/03
Effect of ultrasound on copper filling of high aspect ratio through-silicon via (TSV) (EI收录) 期刊论文
Journal of the Electrochemical Society, 2017, 卷号: 164
作者:  Xiao, Hongbin[1,2];  Wang, Fuliang[1,2];  Wang, Yan[1,2];  He, Hu[1,2];  Zhu, Wenhui[1,2]
收藏  |  浏览/下载:5/0  |  提交时间:2019/04/24
半导体器件制造方法 专利
专利号: US9412657, 申请日期: 2016-08-09, 公开日期: 2016-06-09
作者:  赵超;  朱慧珑;  钟汇才
收藏  |  浏览/下载:13/0  |  提交时间:2017/06/12
Formation of Polymer Insulation Layer (Liner) on Through Silicon Vias (TSV) with High Aspect Ratio over 5:1 by Direct Spin Coating 会议论文
2016 IEEE 66TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), Las Vegas, NV
作者:  Li, Liyi;  Tuan, Chia-Chi;  Moon, Kyoung-Sik;  Zhang, Guoping;  Sun, Rong
收藏  |  浏览/下载:37/0  |  提交时间:2017/01/15
Parameters Analysis of TSV Filling Models of Distinct Chemical Behaviours of Additives 期刊论文
Electrochimica Acta, 2016, 卷号: 221, 页码: 70-79
作者:  Wang, Yan;  Zhu, Wenhui*;  Li, Xiang;  Wang, Fuliang*
收藏  |  浏览/下载:5/0  |  提交时间:2019/12/03


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