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The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials 期刊论文
PHYSICS OF PLASMAS, 2019, 卷号: 26
作者:  Sun, Jing-Yu;  Wen, De-Qi;  Zhang, Quan-Zhi;  Liu, Yong-Xin;  Wang, You-Nian
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