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浏览/检索结果: 共4条，第1-4条 帮助 限定条件 专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China Tan X. 收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25 In ultraviolet spectroscopy  groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore  there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order  it is important to control the groove shape precisely  so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm  especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method  the required blaze angle is small  we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles  and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model  the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides  since the etched groove shape depends on the aspect ratio of the photoresist mask ridge  if we wish to fabricate larger gratings with this method  we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).   Station mode for attitude determination of small-multi-target with high speed (EI CONFERENCE) 会议论文 2010 International Conference on E-Product E-Service and E-Entertainment, ICEEE2010, November 7, 2010 - November 9, 2010, Henan, China Li M.; Wang J.; Zhao L. 收藏  |  浏览/下载：23/0  |  提交时间：2013/03/25 A key problem of attitude measurement of small-multi-target with high speed is how to decide the optimum of the CMOS stations. A multi-CMOS station mode is designed in this paper  multiple CMOS videos were placed on two parallel sides in measurement system  every two CMOS form an intersection viewing field  multiple viewing field join to cover shooting range  which can augment Effective Viewing Field(EVF)  increase capture ratio of objects with high speed and measurement precision of small objects. When an object passes through the joint area  it will be imaged separately on each CMOS focal plane. Multiple CMOS videos were triggered synchronously  a sequence of image information was extracted  the target attitude was confirmed by digital image processing technology. The merit of station mode is low cost  large measurement scope  extending freely and so on. 2010 IEEE.   Design and analysis of power system of micro-electromechanical actuator (EI CONFERENCE) 会议论文 2010 2nd International Conference on Industrial Mechatronics and Automation, ICIMA 2010, May 30, 2010 - May 31, 2010, Wuhan, China Han X.; Liu B.; Zhang J.; Jia H.; Ge W. 收藏  |  浏览/下载：15/0  |  提交时间：2013/03/25 In order to apply the electromechanical actuator to tactical mini-missiles  maximum rotational speed of output shafts is greater than 250/s. Test results basically correspond to the requirement of technical indexes. It is proved that this analysis and design method is congruent with the design of micro-electromechanical actuators  this paper researches on the key technology such as load-bearing ability  the system bandwidth can reach 25.3Hz on the condition of no load and 23.4Hz on the condition of load  thus the method is feasible. 2010 IEEE.  rapidity and miniaturization of the micro-electromechanical actuator power system based on the ball screw. First  according to specific technical indexes  the power  electromechanical time constant and the size of the motors are screened originally through theoretical analysis. Finally  based on the characteristics of ball screw transmission  load locus of the micro-electromechanical actuator dynamic system is theoretically analyzed and the optimum speed ratio is determined through parameter optimization. The results of the double closed loop controlled test on the principle prototype show: the system can operate normally with 2.5N.m hinge moment   A sensitive solid-phase time-resolved fluorescence immunoassay apparatus (EI CONFERENCE) 会议论文 International Symposium on Photoelectronic Detection and Imaging 2009: Laser Sensing and Imaging, June 17, 2009 - June 19, 2009, Beijing, China Wang Y.-L.; Song K.-F.; Zhang W.-L.; Li J.-L. 收藏  |  浏览/下载：24/0  |  提交时间：2013/03/25 In the device  a He-Ne laser of flash frequency 1-20 Hz was adopted as exciting light source  and three key technical problems have been solved successfully in order to enhance the detecting sensitivity and measuring stability of the device for time-resolved fluorimmunoassays(TRFIA) [1]. The first one is to design optimum exciting optical system  so that the exciting light beam excite the sample most effectively. The second one is to have a project spectrum filter which can reduce the affection of the background light to the photomultiplier tube and also ensure influence of the stray light and mixed diffusion light to the sample fluorescence to the least  the sample fluorescence through the integrating sphere and come to the grating monochromator  The right wavelength will be chosed through changing the angle of incidence of the grating monochromator. The third one is to simulate the principle of sample averaging of BOXCAR averager. In the device  SCM was used as primary controller and CPLD was used as timing controller. Through the preparation process  signal-to-noise ratio(SNR) will be improved  also adjust delay time  ampling frequency and sampling number arbitrarily. By testing  the sensitivity is 10-12mol/L(substance marked by Eu3+)  examination repeat is &le2.5%  examination linearity is from 10 -8mol/L to 10-12mol/L  correlation coefficient is 99.98%(p&le0.01). The instrument is advanced for ultrasensitive detection of antigen and antibody  and solve the tumor  genetic variation  the virus protein detection. 2009 SPIE.