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浏览/检索结果: 共4条，第1-4条 帮助 限定条件 内容类型：会议论文     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process 会议论文 Key Engineering Materials, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, South Korea, INSPEC Jing-Feng Li; Songzhe Jin; Yong Li 收藏  |  浏览/下载：2/0 Design and test of a micro digital thruster 会议论文 Proceedings of the SPIE - The International Society for Optical Engineering, Nanoengineering: Fabrication, Properties, Optics, and Devices V, San Diego, CA, USA, INSPEC Dahai Ren; Gaofei Zhang; Xiaolu Wang; Zheng You 收藏  |  浏览/下载：3/0 Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology 会议论文 Proceedings of the SPIE - The International Society for Optical Engineering, MEMS/MOEMS Technologies and Applications III, Beijing, China, INSPEC Hua Li; Gengchen Shi 收藏  |  浏览/下载：2/0 A micro-electromechanical system design and manufacture considering fabrication error 会议论文 Proceedings of the SPIE - The International Society for Optical Engineering, MEMS/MOEMS Technologies and Applications III, Beijing, China, INSPEC Hua Li; Gengchen Shi 收藏  |  浏览/下载：2/0