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浏览/检索结果: 共8条，第1-8条 帮助 限定条件 专题：上海光学精密机械研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Programmable uniformity correction by using plug-in finger arrays in advanced lithography system 期刊论文 Opt. Commun., 2017, 卷号: 392, 页码: 77 作者:  Yang, Baoxi;  Huang, Huijie;  Zeng, Aijun;  Zhu, Jing;  Zhang, Yunbo 收藏  |  浏览/下载：27/0  |  提交时间：2017/12/25 Programmable uniformity correction by using plug-in finger arrays in advanced lithography system 期刊论文 Opt. Commun., 2017, 卷号: 392, 页码: 77 作者:  Zhang, Yunbo;  Zhu, Jing;  Yang, Baoxi;  Zeng, Aijun;  Huang, Huijie 收藏  |  浏览/下载：26/0  |  提交时间：2017/12/25 Large-area three-dimensional profilometer based on digital micromirror device 期刊论文 j. opt. technol., 2015, 卷号: 82, 期号: 2, 页码: 102 作者:  Zhang, Yunbo;  Zeng, Aijun;  Huang, Huijie;  Hou, Wenmei 收藏  |  浏览/下载：12/0  |  提交时间：2016/11/28 A method for measuring the base angle of axicon lens based on chromatic dispersion 期刊论文 opt. commun., 2015, 卷号: 346, 页码: 69 作者:  Zhang, Yunbo;  Zeng, Aijun;  Wang, Ying;  Huang, Huijie 收藏  |  浏览/下载：39/0  |  提交时间：2016/11/28 Illumination system without scanning slit for lithographic tools 会议论文 27th optical microlithography conference as part of the spie advanced lithography symposium 作者:  Zhang, Yunbo;  Zeng, Aijun;  Wang, Ying;  Chen, Mingxing;  Zhang, Shanhua 收藏  |  浏览/下载：21/0  |  提交时间：2016/11/28 Two-dimensional polarization distribution controller based on variable retarder array 期刊论文 optik, 2014, 卷号: 125, 期号: 22, 页码: 6765 作者:  Zhang, Yunbo;  Zeng, Aijun;  Wang, Ying;  Chen, Mingxing;  Huang, Huijie 收藏  |  浏览/下载：13/0  |  提交时间：2016/11/28 Two-dimensional polarization distribution controller  Variable retarder array  Radial and azimuthal polarization distribution   Two-dimensional polarization distribution controller based on variable retarder array 期刊论文 optik, 2014, 卷号: 125, 期号: 22, 页码: 6765 作者:  Zhang, Yunbo;  Zeng, Aijun;  Wang, Ying;  Chen, Mingxing;  Huang, Huijie 收藏  |  浏览/下载：16/0  |  提交时间：2016/11/28 Two-dimensional polarization distribution controller  Variable retarder array  Radial and azimuthal polarization distribution   Model of freeform illumination mode and polarization mode for 193nm immersion lithographic machine 会议论文 conference on optical microlithography xxvi 作者:  Zhang, Yunbo;  Zeng, Aijun;  Wang, Ying;  Chen, Mingxing;  Huang, Huijie 收藏  |  浏览/下载：13/0  |  提交时间：2016/11/28