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科研机构
光电技术研究所 [7]
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期刊论文 [7]
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2018 [1]
2017 [2]
2016 [2]
2015 [2]
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Calibratio... [1]
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Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression
期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382
作者:
Deng, Qinyuan
;
Liu, Junbo
;
Tang, Yan
;
Zhou, Yi
;
Yang, Yong
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2019/08/23
Surface measurement
noise suppression
spatial modulation
Spatial modulation assisted scanning white-light interferometry for noise suppression
期刊论文
IEEE Photonics Technology Letters, 2017
作者:
Deng, Qinyuan
;
Liu, Junbo
;
Tang, Yan
;
Zhou, Yi
;
Yang, Yong
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2018/11/20
Bandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes
期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
作者:
Zhou, Yi
;
Tang, Yan
;
Deng, Qinyuan
;
Liu, Junbo
;
Wang, Jian
收藏
  |  
浏览/下载:53/0
  |  
提交时间:2018/11/20
Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement
Topography measurement of micro structure by modulation-based method
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505
作者:
Zhou, Yi
;
Tang, Yan
;
Liu, Junbo
;
Deng, Qinyuan
;
Cheng, Yiguang
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2018/06/14
Interferometry
Light Sources
Manufacture
Materials Testing
Microstructure
Optical Devices
Pixels
Surface Measurement
Topography
Thickness measurement of transparent film by white-light interferometry
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968506
作者:
Deng, Qinyuan
;
Zhou, Yi
;
Liu, Junbo
;
Yao, Jingwei
;
Hu, Song
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2018/06/14
Film Thickness
Manufacture
Materials Testing
Optical Devices
Optical Films
Reflection
Reflectometers
Structural Design
Thickness Gages
Thickness Measurement
Thin Films
Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 6
作者:
Zhou, Yi
;
Zhu, Jiangping
;
Deng, Qinyuan
;
Liu, Junbo
;
Si, Xinchun
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2016/02/03
Moire fringes
magnification
grating marks
phase analysis
Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 6, 页码: 3900311
作者:
Zhou, Yi
;
Zhu, Jiangping
;
Deng, Qinyuan
;
Liu, Junbo
;
Si, Xinchun
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2016/11/23
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