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Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382
作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong
收藏  |  浏览/下载:34/0  |  提交时间:2019/08/23
Spatial modulation assisted scanning white-light interferometry for noise suppression 期刊论文
IEEE Photonics Technology Letters, 2017
作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong
收藏  |  浏览/下载:21/0  |  提交时间:2018/11/20
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian
收藏  |  浏览/下载:53/0  |  提交时间:2018/11/20
Topography measurement of micro structure by modulation-based method 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505
作者:  Zhou, Yi;  Tang, Yan;  Liu, Junbo;  Deng, Qinyuan;  Cheng, Yiguang
收藏  |  浏览/下载:21/0  |  提交时间:2018/06/14
Thickness measurement of transparent film by white-light interferometry 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968506
作者:  Deng, Qinyuan;  Zhou, Yi;  Liu, Junbo;  Yao, Jingwei;  Hu, Song
收藏  |  浏览/下载:24/0  |  提交时间:2018/06/14
Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System 期刊论文
IEEE PHOTONICS JOURNAL, 2015, 卷号: 7, 期号: 6
作者:  Zhou, Yi;  Zhu, Jiangping;  Deng, Qinyuan;  Liu, Junbo;  Si, Xinchun
收藏  |  浏览/下载:24/0  |  提交时间:2016/02/03
Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System 期刊论文
IEEE Photonics Journal, 2015, 卷号: 7, 期号: 6, 页码: 3900311
作者:  Zhou, Yi;  Zhu, Jiangping;  Deng, Qinyuan;  Liu, Junbo;  Si, Xinchun
收藏  |  浏览/下载:10/0  |  提交时间:2016/11/23


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