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High-order combined geometric-chromatic aberrations of magnetic electron lenses using differential algebra 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 卷号: 35, 期号: 4, 页码: 409-411
作者:  Cheng, M;  Tang, TT;  Yao, ZH
收藏  |  浏览/下载:1/0  |  提交时间:2020/01/07
Study on differential algebraic chromatic aberration method for Glaser's bell-shaped magnetic lenses 期刊论文
OPTIK, 2001, 卷号: 112, 期号: 10, 页码: 483-486
作者:  Cheng, M;  Tang, TT;  Yao, ZH
收藏  |  浏览/下载:1/0  |  提交时间:2020/01/07
Study on differential algebraic aberration method for electrostatic electron lenses 期刊论文
OPTIK, 2001, 卷号: 112, 期号: 6, 页码: 250-254
作者:  Cheng, M;  Tang, TT;  Yao, ZH
收藏  |  浏览/下载:1/0  |  提交时间:2020/01/07
Optimization design of immersion magnetic lenses in projection electron beam lithography 期刊论文
OPTIK, 2001, 卷号: 112, 期号: 4, 页码: 149-152
作者:  Cheng, M;  Tang, TT;  Zhang, P;  Yao, ZH
收藏  |  浏览/下载:4/0  |  提交时间:2020/01/07


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