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Optical performance, structure and thermal stability of Al/Zr multilayers working at above 17nm 会议论文
Damage to VUV, EUV, and X-Ray Optics IV; and EUV and X-Ray Optics: Synergy Between Laboratory and Space III, April 15, 2013 - April 18, 2013, Prague, Czech republic
Wang Z.; Zhong Q.; Zhang Z.; Zhu J.; Bai Y.; Jonnard P.; Le Guen K.; Andre J.-M.
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