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Thermopile ir detector with filter cointegrated by wafer bonding technique 期刊论文
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, 2011, 页码: 724-727
Xu, D.H.; Xiong,B.; Jing, E.R.; Wu, G.Q.; Wang,YL
收藏  |  浏览/下载:11/0  |  提交时间:2012/08/23
Thermopile ir detector with filter cointegrated by wafer bonding technique 期刊论文
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, 2011, 页码: 724-727
Xu, D.H.; Xiong,B.; Jing, E.R.; Wu, G.Q.; Wang,YL
收藏  |  浏览/下载:9/0  |  提交时间:2012/08/23
Thermopile IR detector with filter cointegrated by wafer bonding technique 会议论文
IEEE MEMS 2011:the 24th IEEE Conference on Micro Electro mechanicsal Systems, 2011
Xu, D. H.; Xiong, B.; Jing, E. R.; Wu, G. Q.; Wang, Y. L.
收藏  |  浏览/下载:22/0  |  提交时间:2012/05/04


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