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CORC

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Investigation on the controllable growth of monodisperse silica colloid abrasives for the chemical mechanical polishing application 期刊论文
MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 9, 页码: 1751-1755
Hu, XK; Song, ZT; Wang, HB; Liu, WL; Zhang, ZF
收藏  |  浏览/下载：17/0  |  提交时间：2012/03/24
Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing 期刊论文
POWDER TECHNOLOGY AND APPLICATION II, 2010, 卷号: 92, 页码: 183-187
Hu,XK; Song,ZT; Wang,HB; Liu,WL; Qin,F; Zhang,ZF
收藏  |  浏览/下载：113/0  |  提交时间：2012/03/24
Two-Step Chemical Mechanical Polishing of Sapphire Substrate 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 6, 页码: H688-H691
Zhang, ZF; Liu, WL; Song, ZT; Hu, XK
收藏  |  浏览/下载：19/0  |  提交时间：2012/03/24
Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing 期刊论文
POWDER TECHNOLOGY AND APPLICATION II, 2010, 卷号: 92, 页码: 183-187
Hu, XK; song, zt(重点实验室）; Wang, HB; Liu, WL; Qin, F; Zhang, ZF
收藏  |  浏览/下载：6/0  |  提交时间：2013/05/10
Two-Step Chemical Mechanical Polishing of Sapphire Substrate 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 6, 页码: H688-H691
Zhang, ZF; Liu, WL; song, zt(重点实验室）; Hu, XK
收藏  |  浏览/下载：10/0  |  提交时间：2013/05/10
Investigation on the controllable growth of monodisperse silica colloid abrasives for the chemical mechanical polishing application 期刊论文
MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 9, 页码: 1751-1755
Hu, XK; song, zt(重点实验室）; Wang, HB; Liu, WL; Zhang, ZF
收藏  |  浏览/下载：13/0  |  提交时间：2013/05/10

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