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基于Sn掺杂Ge_2Sb_2Te_5的相变存储器器件单元存储性能 期刊论文
功能材料与器件学报, 2008, 期号: 03
徐成; 刘波; 冯高明; 吴良才; 宋志棠; 封松林; Bomy Chen
收藏  |  浏览/下载：5/0  |  提交时间：2012/01/06
Polycrystalline Si-rich SiSbx bottom heating layer for phase change memory 期刊论文
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 卷号: 11, 期号: 6, 页码: H147-H149
Rao, F; Song, ZT; Zhang, T; Gong, YF; Wu, LC; Feng, SL; Chen, B
收藏  |  浏览/下载：17/0  |  提交时间：2012/03/24
A Novel Method of Fabricating 3D Spot-size Converter on (111) SOI 期刊论文
2008 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS, 2008, 期号: 0, 页码: 79-80
Fang,N; Yang,ZF; Wu,AM; Chen,J; Zhang,M; Zou,SC; Wang,X
收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24
Reactive-ion etching of Sn-doped Ge2Sb2Te5 in CHF3/O-2 plasma for non-volatile phase-change memory device 期刊论文
THIN SOLID FILMS, 2008, 卷号: 516, 期号: 21, 页码: 7871-7874
Xu, C; Liu, B; Song, ZT; Feng, SL; Chen, BM
收藏  |  浏览/下载：10/0  |  提交时间：2012/03/24
Oxidant addition effect on Ge2Sb2Te5 phase change film chemical mechanical polishing 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 卷号: 155, 期号: 11, 页码: H929-H931
Zhong, M; Song, ZT; Liu, B; Feng, SL; Chen, B
收藏  |  浏览/下载：11/0  |  提交时间：2012/03/24
Self-assembly of II-IV compound nanocrystals on Si wafer at room temperature 期刊论文
JOURNAL OF INFRARED AND MILLIMETER WAVES, 2008, 卷号: 27, 期号: 3, 页码: 176-179
Zhao, WM; Gan, XH; Dai, M; Xu, L; Sun, P; Li, W; Ma, Y; Ma, ZY; Wu, LC; Xu, J; Chen, KJ
收藏  |  浏览/下载：16/0  |  提交时间：2012/03/24
Comparison of the crystallization of Ge-Sb-Te and Si-Sb-Te in a constant-temperature annealing process 期刊论文
SCRIPTA MATERIALIA, 2008, 卷号: 58, 期号: 11, 页码: 977-980
Zhang, T; Cheng, Y; Song, ZT; Liu, B; Feng, SL; Han, XD; Zhang, Z; Chen, B
收藏  |  浏览/下载：15/0  |  提交时间：2012/03/24
Germanium nitride interfacial layer for chalcogenide random access memory applications 期刊论文
APPLIED PHYSICS EXPRESS, 2008, 卷号: 1, 期号: 1, 页码: 11201-11201
Shen, J; Liu, B; Song, Z; Xu, C; Rao, F; Liang, S; Feng, S; Chen, B
收藏  |  浏览/下载：10/0  |  提交时间：2012/03/24
Reactive ion etching as cleaning method post chemical mechanical polishing for phase change memory device 期刊论文
CHINESE PHYSICS LETTERS, 2008, 卷号: 25, 期号: 2, 页码: 762-764
Zhong, M; Song, ZT; Liu, B; Feng, SL; Chen, B
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/24
Fabrication of thin-film silicon on insulator by separation by implanted oxygen layer transfer 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 卷号: 26, 期号: 6, 页码: L45-L47
Wei, X; Wu, AM; Chen, M; Chen, J; Zhang, M; Wang, X; Lin, CL
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24

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