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科研机构
安徽大学 [11]
内容类型
期刊论文 [11]
发表日期
2017 [2]
2016 [2]
2015 [2]
2014 [4]
2010 [1]
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专题:安徽大学
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Annealing-temperature-modulated optical, electrical properties, and leakage current transport mechanism of sol-gel-processed high-k HfAlOX gate dielectrics
期刊论文
CERAMICS INTERNATIONAL, 2017, 卷号: Vol.43 No.3, 页码: 3101-3106
作者:
Li,W. D.
;
Jin,P.
;
Zhang,M.
;
Xiao,D. Q.
;
Fang,Z. B.
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2019/04/22
THIN-FILMS
INTERFACIAL PROPERTIES
HFO2 FILMS
MICROSTRUCTURE
EVAPORATION
NITRIDATION
DEPOSITION
Annealing temperature-dependent microstructure and optical and electrical properties of solution-derived Gd-doped ZrO2 high-k gate dielectrics
期刊论文
Journal of Sol-Gel Science and Technology, 2017, 卷号: Vol.83 No.3, 页码: 675-682
作者:
Liang, S.
;
Jiang, S. S.
;
Sun, Z. Q.
;
He, G.
;
Zhu, L.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/22
ATOMIC LAYER DEPOSITION
OXIDE THIN-FILMS
INTERFACIAL PROPERTIES
PLASMA-OXIDATION
HFO2
TRANSISTORS
MODULATION
SILICON
TIO2
ALD
Microstructure, optical and electrical properties of sputtered HfFiO high-k gate dielectric thin films
期刊论文
CERAMICS INTERNATIONAL, 2016, 卷号: Vol.42 No.10, 页码: 11640-11649
作者:
Lv,J. G.
;
Li,W. D.
;
Jin,P.
;
Liu,Y. M.
;
Xiao,D. Q.
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/04/22
ANNEALING TEMPERATURE
PHYSICAL-PROPERTIES
BAND ALIGNMENT
HFO2
MODULATION
CAPACITORS
STACKS
TIO2
Microstructure, optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high-k HfO2 gate dielectrics
期刊论文
Ceramics International, 2016, 卷号: Vol.42 No.6, 页码: 6761-6769
作者:
Sun,Zhaoqi
;
Liu,Yanmei
;
Zhang,Miao
;
Lv,Jianguo
;
Liu,Mao
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/04/22
THIN-FILMS
TEMPERATURE-DEPENDENCE
HAFNIUM
DEPOSITION
STACKS
ALD
Effects of rapid thermal annealing on interfacial and electrical properties of Gd-doped HfO2 high-k gate dielectrics
期刊论文
Journal of Alloys and Compounds, 2015, 卷号: Vol.646, 页码: 310-314
作者:
Jiweng Zhang
;
Mao Liu
;
Lide Zhang
;
Juan Gao
;
Xuefei Chen
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/04/22
Gd-doped
HfO
thin
film
Rapid
thermal
annealing
Interfacial
properties
Electrical
properties
Modulation of charge trapping and current-conduction mechanism of TiO2-doped HfO2 gate dielectrics based MOS capacitors by annealing temperature
期刊论文
Journal of Alloys and Compounds, 2015, 卷号: Vol.647, 页码: 1054-1060
作者:
X.F. Chen
;
Z.Q. Sun
;
H.S. Chen
;
J.W. Zhang
;
R. Ma
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/22
High-k
gate
dielectrics
TiO-doped
HfO
Puttering
Current-conduction
mechanism
Annealing temperature dependence on the structural and optical properties of sputtering-grown high-k HfO2 gate dielectrics
期刊论文
Journal of Materials Science. Materials in Electronics, 2014, 卷号: Vol.25 No.9, 页码: 4163-4169
作者:
G. He
;
M. Liu
;
J. W. Zhang
;
X. F. Chen
;
Z. Q. Sun
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/22
Interfacial thermal stability and band alignment of Al2O3/HfO2/Al2O3/Si gate stacks grown by atomic layer deposition
期刊论文
Journal of Alloys and Compounds, 2014, 卷号: Vol.591, 页码: 240-246
作者:
Wei,H.H.
;
Sun,Z.Q.
;
Cui,J.B.
;
Zhang,M.
;
Chen,H.S.
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/24
High-k
gate
dielectrics
Annealing
temperature
X-ray
photoelectron
Spectroscopy
Band
alignment
Microstructure optimization and optical and interfacial properties modulation of sputtering-derived HfO2 thin films by TiO2 incorporation
期刊论文
Journal of Alloys and Compounds, 2014, 卷号: Vol.611, 页码: 253-259
作者:
Zhou, L
;
He, G
;
Chen, XF
;
Zhang, JW
;
Chen, HS
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/04/24
High-k gate dielectrics
TiO-doped HfO
RF sputtering
Optical constant
Interface optimization and modification of band offsets of ALD-derived Al2O3/HfO2/Al2O3/Ge gate stacks by annealing temperature
期刊论文
Journal of Alloys and Compounds, 2014, 卷号: Vol.615, 页码: 672-675
作者:
He, G
;
Liu, M
;
Wei, HH
;
Gao, J
;
Chen, XS
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/24
High-k gate dielectrics
Annealing temperature
Band offset
Thermal stability
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