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Formation of silicon on plasma synthesized SiOxNy and reaction mechanism 期刊论文
APPLIED SURFACE SCIENCE, 2005, 卷号: 243, 期号: 1-4, 页码: 89-95
Zhu, M; Shi, XJ; Chen, P; Liu, WL; Wong, M; Lin, CL; Chu, PK
收藏  |  浏览/下载:7/0  |  提交时间:2012/03/24
Short-wavelength photoluminescence from silicon and nitrogen coimplanted SiO2 films 期刊论文
APPLIED PHYSICS LETTERS, 1999, 卷号: 74, 期号: 10, 页码: 1403-1405
Zhao, J; Mao, DS; Lin, ZX; Ding, XZ; Jiang, BY; Yu, YH; Liu, XH; Yang, GQ
收藏  |  浏览/下载:23/0  |  提交时间:2012/03/25


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