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Roller nanoimprint lithography for low-cost nanoscale random lattice diffractive optical elements 期刊论文
AIP Advances, 2020, 卷号: 10, 期号: 3, 页码: 035221-1-6
作者:  Zhang, Man;  Xia, Liang-Ping;  Dang, Sui-Hu;  Cao, A-Xiu;  Shi, Li-Fang
收藏  |  浏览/下载：8/0  |  提交时间：2021/05/11
Generation of Color Images by Utilizing a Single Composite Diffractive Optical Element 期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 10, 页码: 508
作者:  Wang, Jiazhou;  Liu, Liwei;  Cao, Axiu;  Pang, Hui;  Xu, Chuntao
收藏  |  浏览/下载：47/0  |  提交时间：2019/08/23
Dual-Channel Light Intensity Modulation Method for Focusing in Projection Lithography 期刊论文
IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 1
作者:  Li, Yanli;  Yan, Wei;  Hu, Song;  Feng, JinHua;  Wang, Jian
收藏  |  浏览/下载：13/0  |  提交时间：2016/06/27
Moire-Based Absolute Interferometry With Large Measurement Range in Wafer-Mask Alignment 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Yin, Didi;  Ma, Chifei
收藏  |  浏览/下载：18/0  |  提交时间：2015/07/10
A Moire-Based Four-Channel Focusing and Leveling Scheme for Projection Lithography 期刊论文
IEEE PHOTONICS JOURNAL, 2014, 卷号: 6, 期号: 4
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Li, Yanli;  Yin, Didi
收藏  |  浏览/下载：24/0  |  提交时间：2015/07/10
A moiré-based four-channel focusing and leveling scheme for projection lithography 期刊论文
IEEE Photonics Journal, 2014, 卷号: 6, 期号: 4, 页码: 6842663
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Li, Yanli;  Yin, Didi
收藏  |  浏览/下载：14/0  |  提交时间：2016/11/23
Technology of focus detection for 193nm projection lithographic tool 会议论文
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Xu, Feng;  Li, Jinglong
收藏  |  浏览/下载：8/0  |  提交时间：2016/11/24
Moire-based focusing and leveling scheme for optical projection lithography 期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 31, 页码: 5959-5963
作者:  Yan, Wei;  Yang, Yong;  Chen, Wangfu;  Hu, Song;  Zhou, Shaolin
收藏  |  浏览/下载：17/0  |  提交时间：2015/09/21
Extended dual-grating alignment method for optical projection lithography 期刊论文
APPLIED OPTICS, 2010, 卷号: 49, 期号: 4, 页码: 708-713
作者:  Chen, Wangfu;  Yan, Wei;  Hu, Song;  Yang, Yong;  Zhou, Shaolin
收藏  |  浏览/下载：9/0  |  提交时间：2015/09/21
An optical modulation based focus method for optical projection lithography 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:  Wangfu Chen;  Song Hu
收藏  |  浏览/下载：12/0  |  提交时间：2016/11/24

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