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Correction algorithm of edge effects in inductively coupled plasma processing 期刊论文
Optik, 2020, 卷号: 223
作者:  Zhang, Shiyang;  Fan, Bin;  Wang, Yongjian;  Xin, Qiang;  Wu, Jie
收藏  |  浏览/下载:18/0  |  提交时间:2021/05/11
Reducing edge error based on further analyzing the stability of edge TIF and correcting the post-edge algorithm in MRF process 期刊论文
OPTICAL REVIEW, 2019, 卷号: 27, 期号: 1, 页码: 14-22
作者:  Zhong, Xianyun;  Fan, Bin;  Wu, Fan
收藏  |  浏览/下载:33/0  |  提交时间:2021/05/11
Optimization of the edge extension in dwell time algorithm for ion beam figuring 会议论文
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2012
作者:  Shu, Liangxuan;  Wu, Fan;  Shi, Chunyan
收藏  |  浏览/下载:13/0  |  提交时间:2016/11/24


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