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Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition 期刊论文
APPLIED SURFACE SCIENCE, 2008, 卷号: 255, 期号: 5, 页码: 1836-1840
作者:  Wang, Q;  Wang, CB;  Wang, Z;  Zhang, JY;  He, DY
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The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition 期刊论文
APPLIED PHYSICS LETTERS, 2008, 卷号: 93, 期号: 13, 页码: -
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