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Effects of mold geometries and initial thickness on resist filling characteristics in UV-NIL 期刊论文
Zhejiang Daxue Xuebao (Gongxue Ban)/Journal of Zhejiang University (Engineering Science), 2012, 卷号: 46, 期号: [db:dc_citation_issue], 页码: 1175-1181
作者:  Du, Jun;  Wei, Zheng-Ying;  Xiong, Xiao-Dong;  He, Wei;  Tang, Yi-Ping
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/10
Effects of Mold Geometries and Initial Resist Thickness on Filling Behavior in UV-Nanoimprint Lithography 期刊论文
JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2012, 卷号: 9, 期号: [db:dc_citation_issue], 页码: 1029-1035
作者:  Du, Jun;  Wei, Zhengying;  He, Wei;  Tang, Yiping
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/10
Analysis of resist's flow behavior during micro imprinting 期刊论文
Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2010, 卷号: 21, 期号: [db:dc_citation_issue]
作者:  Wen, Juying;  Wei, Zhengying;  Xiong, Xiaodong;  Du, Jun;  Lu, Bingheng
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/10
Flow behavior of resist in room-temperature micro-imprinting and its process optimization 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2010, 卷号: 18, 期号: [db:dc_citation_issue], 页码: 1822-1832
作者:  Wei, Zheng-Ying;  Xiong, Xiao-Dong;  Du, Jun;  Ding, Yu-Cheng
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/10


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