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Smooth and vertical etching of GaAs/GaInP/AlGaInP using inductively coupled Cl/sub 2//BCl/sub 3//CH/sub 4/ plasma 期刊论文
2010, 2010
Zhibiao Hao; Shuo Han; Fan Ren; Bing Xiong; Changzheng Sun; Yi Luo
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Deep InP gratings for opto-electronic devices etched by Cl/sub 2 //CH/sub 4//Ar inductively coupled plasma 期刊论文
2010, 2010
Wang Jian; Tian Jian-Bai; Xiong Bing; Sun Chang-Zheng; Hao Zhi-Biao; Luo Yi
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Energetics of the growth mode transition in InAs/GaAs(001) small quantum dot formation: A first-principles study 期刊论文
2010, 2010
Liu, En-Zuo; Wang, Chong-Yu
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