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Simulation of ion transport in an extended electron cyclotron resonance plasma 期刊论文
Journal of Applied Physics, 2000, 卷号: 87, 期号: 3, 页码: 1070-1075
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Wu QC;  Yu GY
收藏  |  浏览/下载:1450/58  |  提交时间:2007/06/15
Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition 期刊论文
Surface & Coatings Technology, 2000, 卷号: 131, 期号: 1-3, 页码: 29-33
作者:  Liu MH;  Hu XW;  Wu HM(吴汉明);  Wu QC;  Yu GY
收藏  |  浏览/下载:1820/307  |  提交时间:2007/06/15
Behavior of ar plasma formed in a high-density plasma source - an ecr reactor 期刊论文
Acta Physica Sinica-Overseas Edition, 1994, 卷号: 3, 期号: 10, 页码: 746-757
作者:  Wu HM(吴汉明);  Graves DB;  Porteous RK;  Li M
收藏  |  浏览/下载:1391/44  |  提交时间:2009/08/03


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