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浏览/检索结果: 共6条，第1-6条 帮助 限定条件 内容类型：其他     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Anchor design for microdevice fabricated by silicon-on-glass process based on bonding strength consideration 其他 2013-01-01 He, Jun; Yang, Fang; Zhao, Danqi; Huang, Xian; Wang, Wei; Zhang, Dacheng 收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13 Process-Induced Stress and Hydrogen Effects on Monolithic Integrated CMOS-MEMS Micro-Bimaterial Cantilever Sensor Array 其他 2012-01-01 Zhao, Danqi; Yang, Fang; Liu, Peng; Lin, Chen; He, Jun; Huang, Xian; Li, Dan; Zhang, Xia; Zhang, Dacheng 收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10 Post-CMOS  Monolithic Integration  Stress  Hydrogen  Bimaterial  Uncooled IR Sensor   Characterizing Metallization Introduced Polysilicon Corrosion of Surface Micromachined Structures with Submicron Capacitive Gap 其他 2008-01-01 Wang, Yunda; Cai, Ming; Wang, Ying; Chen, Jing 收藏  |  浏览/下载：6/0  |  提交时间：2015/11/13 HF release  Polysilicon corrosion  Au  parylene  POROUS SILICON   An improved method employed in anodic bonded glass-silicon gyroscopes to avoid footing effect in DRIE 其他 2004-01-01 Fan, J; Zhu, Y; Yang, ZC; Zhou, J; Liu, XS; Yan, GZ 收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13 footing effect  DRIE lag effect  glass-silicon anodic bonding  SGADER  BACKSIDE DAMAGE   An improved method employed in anodic bonded glass-silicon gyroscopes to avoid footing effect in DRIE 其他 2004-01-01 Fan, Jie; Zhu, Yong; Yang, Zhenchuan; Zhou, Jian; Liu, Xuesong; Yan, Guizhen 收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13 THE COMPLEXATION OF METALLOTHIONEIN WITH CADMIUM ION AND ITS CONFORMATIONAL STUDY 其他 1991-01-01 CHU, DY; LIN, Y; LIU, RL; RU, BG 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13 CIRCULAR-DICHROISM  PROTEIN  BINDING  LIVER  RAT  CD