CORC

在结果中检索

CORC

浏览/检索结果: 共24条，第1-10条 帮助

限定条件    
已选(0)清除 条数/页：   排序方式：
Fully coupled electro-thermal simulation of a micro pirani gauge 其他
2010-01-01
Jiang, Wei; Zhou, Jilong; Wang, Xin; Wang, Long; Zhang, Jinwen
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
A simple micro pirani vacuum gauge fabricated by bulk micromachining technology 其他
2009-01-01
Jinwen, Zhang; Wei, Jiang; Jilong, Zhou; Xin, Wang
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
An uncooled microcantilever IR detector based on bulk silicon technique 其他
2009-01-01
Yuliang, Yi; Xiaomei, Yu; Wenhua, Xu; Ming, Liu; Liquan, Dong; Xiaohua, Liu; Andi, Zhao; Yuejin, Zhao
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
A surface plasmon resonance (SPR) sensor chip integrating prism array based on polymer microfabrication 其他
2008-01-01
Geng, Zhao-xin; Ji, Xu; Lou, Xia; Li, Qing; Wang, Wei; Li, Zhi-hong
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
A surface plasmon resonance (SPR) sensor chip integrating prism array based on polymer microfabrication 其他
2008-01-01
Geng, Zhao-Xin; Ji, Xu; Lou, Xia; Li, Qing; Wang, Wei; Li, Zhi-Hong
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
Silicon-based MEMS fabrication techniques and standardization 其他
2007-01-01
Hao, Yilong
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Hybrid electrostatic actuator for micromirror tilting 其他
2005-01-01
Wu, W.G.; Chen, Q.H.; Yan, G.Z.; Hao, Y.L.; Yin, D.Q.; Chen, Z.Y.; Xu, A.S.
收藏  |  浏览/下载：6/0  |  提交时间：2015/11/13
An improved electrostatically-driven micro torsion mirror fabricated by silicon micromachining for optical switching devices 其他
2004-01-01
Chen, QH; Wu, WG; Li, DC; Yan, GZ; Hao, YL
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13
Fabrication and characterization of a novel bulk Si micromachined distributed microwave phase shifter 其他
2004-01-01
Miao, M; Jin, YF; Zhang, JW; Wu, GY; Hao, YL; Zhang, HX
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Investigation of fabricating ultra deep and high aspect ratio electrical isolation trench without void 其他
2004-01-01
Zhu, Y; Fan, J; Wang, CW; Zhou, J; Liu, XS; Yan, GZ; Wang, YY
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13

©版权所有 ©2017 CSpace - Powered by CSpace