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浏览/检索结果: 共8条，第1-8条 帮助 限定条件 内容类型：会议论文     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Technology of focus detection for 193nm projection lithographic tool 会议论文 Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012 作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Xu, Feng;  Li, Jinglong 收藏  |  浏览/下载：8/0  |  提交时间：2016/11/24 An optical modulation based focus method for optical projection lithography 会议论文 Proceedings of the SPIE - The International Society for Optical Engineering, 2010 作者:  Wangfu Chen;  Song Hu 收藏  |  浏览/下载：12/0  |  提交时间：2016/11/24 Positioning scheme based on grating modulation and phase imaging in lithography 会议论文 Proceedings of the SPIE - The International Society for Optical Engineering, 2010 作者:  Shaolin Zhou;  Feng Xu;  Song Hu;  Xiaoping Tang 收藏  |  浏览/下载：11/0  |  提交时间：2016/11/24 Handling of Multi-reflections in Wafer Bump 3D Reconstruction 会议论文 2008 IEEE International Conference on Systems, Man and Cybernetics, SMC 2008 Jun Cheng; Ronald Chung; Edmund Y. Lam; Kenneth S.M. Fung 收藏  |  浏览/下载：11/0  |  提交时间：2015/08/21 Wavelet digital filter method for image processing of 3D measurement profilometry 会议论文 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, NOV 02-05, 2005 作者:  Wang, YS;  Fu, S;  Xu, JQ;  Zhou, CL;  Si, SC 收藏  |  浏览/下载：7/0  |  提交时间：2019/12/31 Fourier transform  projection grating  wavelet digital filter  separate   3D micro-profile measurement of energy distribution of laser beam 会议论文 Proceedings of the International Symposium on Precision Mechanical Measurement, 11 August 2002 through 16 August 2002 作者:  Yu, Fusheng;  Ai, Xing;  Si, Shuchun;  Shen, Xiaoqin 收藏  |  浏览/下载：1/0  |  提交时间：2019/12/31 3D micro-profile  Laser beam energy distribution  Micro-grating-projection method  Parameters description   Research on binocular 3D measurement model based on grating projection 会议论文 Shenzhen, China, December 19, 2009 - December 20, 2009 作者:  Chen, Yuming[1] 收藏  |  浏览/下载：5/0  |  提交时间：2019/12/26 An three-dimensional measurement system design based on projection grating 会议论文 Nanchang, PEOPLES R CHINA, NOV 21-22, 2009 作者:  Chen, Yuming[1] 收藏  |  浏览/下载：0/0  |  提交时间：2019/12/26