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浏览/检索结果: 共1条，第1-1条 帮助 限定条件 内容类型：会议论文    专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Modelling of the electric field assisted capillarity effect used for the fabrication of hollow polymer microstructures (EI CONFERENCE) 会议论文 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2012, April 16, 2012 - April 18, 2012, Cascais, Portugal Tonry C.; Patel M.; Bailey C.; Desmuliez M. P. Y.; Cargill S.; Yu W. 收藏  |  浏览/下载：87/0  |  提交时间：2013/03/25 Electric Field Assisted Capillarity (EFAC) is a novel process which has the potential for the single step fabrication of hollow polymer microstructures. The process has been shown to work experimentally on a microscale level using Polydimethylsiloxane (PDMS). The process makes use of both the electrohydrodynamics of polymer at a microscale and the voltage enhanced capillary force exerted on the polymer. This paper discusses the results of a two-dimensional numerical simulation of this process. The results presented use a patterned master electrode producing encapsulated microchannels in the polymer. The simulations demonstrate how the differing contact angles between the polymer and the walls of the master electrode affect the thickness of the top surface of the formed microstructures. It also specifies the conditions necessary for the successful fabrication of such microstructures. 2012 IEEE.