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Development of the depth-graded multilayers for XTP mission 会议论文
Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray, June 22, 2014 - June 26, 2014, Montreal, QC, Canada
Jiang L.; Qi R.; Wen M.; Zhang Z.; Ma B.; Wang Z.; Bai Y.
收藏  |  浏览/下载：15/0  |  提交时间：2015/04/27
Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
Tan X.
收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25
In ultraviolet spectroscopy  groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore  there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order  it is important to control the groove shape precisely  so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm  especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method  the required blaze angle is small  we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles  and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model  the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides  since the etched groove shape depends on the aspect ratio of the photoresist mask ridge  if we wish to fabricate larger gratings with this method  we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
Roughness analysis of optical surfaces by X-ray scattering (EI CONFERENCE) 会议论文
2011 International Conference on Electronics and Optoelectronics, ICEOE 2011, July 29, 2011 - July 31, 2011, Dalian, China
Meng Y.; Chen B.; Chen C.
收藏  |  浏览/下载：17/0  |  提交时间：2013/03/25
A grazing incidence x-ray scattering (XRS) method  Order perturbation theory (FOPT)  is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced  which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree  as the x-ray wavelength is 0.154 nm  have been given and analyzed by the FOPT to give information about the surface profiles. As a comparison  the root mean square (RMS) surface roughness  grey-scale maps and one-dimensional power spectral density (1D PSD) have been derived from the atomic-force microscope (AFM) data. The results evaluated by FOPT are in good agreement with that of AFM  which indicates that x-ray scattering method is a practical characterization for the investigation of super smooth surfaces. 2011 IEEE.  
1D-KBA microscope using double-periodic multilayer (EI CONFERENCE) 会议论文
Advances in X-Ray/EUV Optics and Components IV, August 3, 2009 - August 5, 2009, San Diego, CA, United states
Mu B.; Wang Z.; Yi S.; Zhu J.; Wang X.; Jiang L.; Huang Q.; Bai Y.
收藏  |  浏览/下载：9/0  |  提交时间：2013/03/25
To study the action of shock wave in CH target  one-dimensional grazing incidence KBA microscope for 4.75keV energy was set up. Because of strong absorption in air  4.75keV energy microscope can just work in vacuum. Accordingly  the alignment and assemblage will be very complicated and difficult. A special multilayer method  using double periodic multilayer  was proposed to solve this problem. This multilayer has high reflectivity not only for 4.75keV X-rays but also for 8keV X-rays at the same grazing incidence angle. It means 1D-KBA microscope has the same light trace for different working energies. Therefore  we can implement the alignment and assembly of 4.75keV system by the help of 8keV X-rays. Because 8keV X-rays is very easy produced by X-ray tube and has strong transmittability in air  the alignment and assemblage process became relatively easy. By now  we have finished the alignment experiment at 8keV and obtained imaging results. The performance is about 2-3m resolution in 250m field of view. It is coincide with the calculation. 2009 SPIE.  
Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE) 会议论文
Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states
Yan-li M.; Yong-gang W.; Shu-yan C.; Bo C.
收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25
A soft x-ray reflectometer with laser produced plasma source has been designed  which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above  the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand  both the two samples are measured by WYKO surface profiler  and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler  which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO  and the possible reasons of such difference have been discussed in detail. 2009 SPIE.  
Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Jin W.; Jin C.; Liu L.; Zhu H.; Yang H.
收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25
We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First  we obtained the structure information (the layer thickness  surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second  based on the acquired structure information  the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally  the optical band gap is verified by Taue plot method  which is well consistent with that of SE.  
Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Jin W.; Jin C.; Zhu H.; Liu L.; Yang H.
收藏  |  浏览/下载：19/0  |  提交时间：2013/03/25
Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First  Second  Third  alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method  Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra  based on the acquired structure information  the structure information (the thickness of the aluminum and the cap layer  the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally  surface roughness and the diffusion between Al-Al2O 3) is obtained  an induced transmission filter (ITF) is designed and deposited.  
Determination of optical constants of zirconia and silica thin films in UV to visible range (EI CONFERENCE) 会议论文
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China
Jin W.; Jin C.; Zhu H.; Liu L.; Yang H.
收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25
A curve fitting method for determining the optical constants of some dielectric thin films is described with dispersion theory in the paper. A computer program based on Matlab is developed and optimized. The fitting errors are analyzed with theoretical data  which gives very high accurate results. A program is applied to fitting the measured photometric spectra of ion sputtered zirconia and silica thin films in 200-850nm spectra range. The thickness is verified with the method of grazing x-ray diffraction. With the thickness known  the optical constants of zirconia films near the absorption range are obtained with single-wavelength method. As a result  quite good fitting results are obtained with high accuracy. Finally  an ultraviolet (UV) high-pass optical filter is designed with optical constants extracted by this method. The transmission and reflection spectra of the filter are measured and compared to designed spectra. A good coherence was derived.  
Research and analysis of non-coaxial x-ray microscopy working at grazing incidence (EI CONFERENCE) 会议论文
Australian Conference on Optical Fibre Technology/Australian Optical Society, ACOFT/AOS 2006, July 10, 2006 - July 13, 2006, Melbourne, VIC, Australia
Jiasheng H.; Yuhong B.
收藏  |  浏览/下载：10/0  |  提交时间：2013/03/25
Imaging quality analysis of KBA x-ray microscope working at grazing incidence (EI CONFERENCE) 会议论文
Optical Design and Testing II, November 8, 2004 - November 11, 2004, Beijing, United states
Hu J.; Zhao L.; Li X.; Wu X.; Bai Y.
收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25
In the latest 20 years  x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching  spatial exploration technology  high-energy physics  procedure diagnosis of inertial confinement fusion (ICF) et al. Since refractive index of materials in the x-ray region is lower than 1  and x-ray is strongly absorbed by materials  it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general  grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper  according to user's requirement  we have designed a non-coaxial grazing KBA microscope. The microscope consists of two sets of perpendicular spherical mirrors  each set includes two parallel mirrors. Taking it as an example  we have compiled an optical computing program for the non-coaxial grazing imaging systems so as to analyze and evaluate aberrations of KBA microscope. Thus it can help us to get an optimal comprehension of KBA x-ray imaging system. In the same time  the analytical results provide reliable foundation for evaluating imaging quality of KBA microscope.  

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