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Low temperature PECVD SiNx films applied in OLED packaging 期刊论文
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2003, 卷号: 98, 期号: 3, 页码: 248-254
Huang,WD; Wang,XH; Sheng,M; Xu,LQ; Stubhan,F; Luo,L; Feng,T; Wang,X; Zhang,FM; Zou,SC
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