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Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications 期刊论文
半导体学报, 2009, 卷号: 30, 期号: 8, 页码: 34-38
Xie Jing; Liu Yunfei; Yang Jinling; Tang Longjuan; Yang Fuhua
收藏  |  浏览/下载:22/0  |  提交时间:2010/11/23
Lithography-independent and large scale fabrication of a metal electrode nanogap 期刊论文
半导体学报, 2009, 卷号: 30, 期号: 9, 页码: 142-145
作者:  Li Yan;  Zhang Jiayong;  Fan Zhongchao
收藏  |  浏览/下载:12/0  |  提交时间:2010/11/23
Studies of 6H-SiC devices 期刊论文
current applied physics, 2002, 卷号: 2, 期号: 5, 页码: 393-399
Wang SR; Liu ZL
收藏  |  浏览/下载:57/0  |  提交时间:2010/08/12
THE OXIDATION-KINETICS OF THIN POLYCRYSTALLINE SILICON FILMS 期刊论文
journal of the electrochemical society, 1991, 卷号: 138, 期号: 1, 页码: 214-219
WANG YY; JIANG T; SHEN T; SUN TJ; ZHANG AZ; FENG SQ
收藏  |  浏览/下载:17/0  |  提交时间:2010/11/15


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