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Microstructures of microcrystalline silicon thin films prepared by hot wire chemical vapor deposition 期刊论文
thin solid films, 2000, 卷号: 360, 期号: 1-2, 页码: 205-212
Zhu M; Guo X; Chen G; Han H; He M; Sun K
收藏  |  浏览/下载:101/0  |  提交时间:2010/08/12
Relaxed GexSi1-x layer formation with reduced dislocation density grown by ultrahigh vacuum chemical vapor deposition 期刊论文
applied physics a-materials science & processing, 2000, 卷号: 70, 期号: 4, 页码: 449-451
Luo GL; Chen PY; Lin XF; Tsien P; Fan TW
收藏  |  浏览/下载:51/0  |  提交时间:2010/08/12


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