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Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth 会议论文
14th International Conference on Crystal Growth (ICCG-14, ICVGE-12), Aug. 9-13, 2004, Grenoble, France
作者:  Chen QS(陈启生)
收藏  |  浏览/下载:1065/28  |  提交时间:2007/12/18


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