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Digital spin valve magnetic field sensor and manufacturing technology thereof 专利
申请日期: 2013-01-01,
作者:  CHEN YUYUAN;  CAI KE;  ZHAO CHUNHUI;  WANG LEI
收藏  |  浏览/下载:9/0  |  提交时间:2019/04/19
Method for performing plane carbon preparation of flat carbon film membrane electrode, involves performing uniformly spin coating of photoresist on conductive substrate, and under protection of inert gas with certain pressure. 专利
申请日期: 2013-01-01, 公开日期: 2013-05-01
作者:  SHI K ZHANG H WANG C ZHAN D ZHANG Y
收藏  |  浏览/下载:8/0  |  提交时间:2019/12/13
Microfabrication of SU-8 photoresist comprises grinding cleaned metal substrate and rotary coating SU-8 photoresist, exposing, baking, ultrasonically processing spin coating, developing SU-8 photoresist film, washing, and drying. 专利
申请日期: 2013-01-01, 公开日期: 2013-12-11
作者:  ZHAO M ZHAO S ZHANG X DU L WANG A
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/13


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