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The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films 期刊论文
Surface and Coatings Technology, 2008, 卷号: 202, 页码: 2684-2689
作者:  Wang P(王鹏);  Zhang JY(张俊彦);  Wang LP(王立平);  Zhang GA(张广安)
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