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Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy 期刊论文
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2005, 卷号: 11, 期号: 2-3, 页码: 97-103
作者:  Qian J(钱劲);  Yu TX(余同希);  Zhao YP(赵亚溥)
收藏  |  浏览/下载:1727/152  |  提交时间:2007/06/15


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