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MEV IMPLANTATION INTO SEMICONDUCTORS 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 卷号: Jan-80, 页码: 507-513
WILLIAMS, JS; ELLIMAN, RG; RIDGWAY, MC; JAGADISH, C; ELLINGBOE, SL; GOLDBERG, R; PETRAVIC, M; WONG, WC; DEZHANG, Z; NYGREN, E; SVENSSON, BG
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