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光电子学 18 半导体材料 8 半导体器件 4
微电子学 2 材料科学与物理化学 2 Aberrations - Computer simulation - Image quality - Optical instrument lenses - Optical systems - Patents and inventions - Photolithography - Refractive index - Wavefronts 1
Alignment - Lithography - Nanoimprint lithography - Photolithography 1 Chemistry, Multidisciplinary 1 Computer simulation - Electromagnetic wave polarization - Finite difference time domain method - Photolithography - Plasmons - Time domain analysis 1
Diffraction - Light polarization - Lithography - Microanalysis - Microfabrication - Periodic structures 1 Diffraction - Photolithography 1 Diffraction gratings - Near field scanning optical microscopy - Photoresists 1
Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics 1 Engineering; Science & Technology - Other Topics; Materials Science; Physics 1 Lithography - Photolithography 1
Manufacture - Microelectronics - Nanotechnology - Photolithography - Semiconductor device manufacture - Technology 1 Multilayers; Subwavelength structures; Metamaterials; Plasmonics 1 Numerical methods - Optimization - Photolithography 1
Optics 1 Physics 1 SCANNING INTERFEROMETER; THICKNESS MEASUREMENT; SILVER SUPERLENS; LITHOGRAPHY; RESOLUTION; PHOTOLITHOGRAPHY; EVANESCENT; LIGHT; FILM; NANOLITHOGRAPHY 1
computer applications;optical devices and systems;electromagnetic waves in different media;manufacturing; nuclear physics; plasma physics;optical instruments;engineering graphics; electricity and magnetism 1 electron tubes; chemical products generally 1 optics 1
organic polymers;biochemistry;optical devices and systems;manufacturing;light/optics;biomaterials (including synthetics) 1 交叉与边缘领域的力学 1 人工智能 1
光存储 1 光学 1 光学工程 1
力学 1 固体力学 1 天文学 1
微细加工技术 1 物理化学 1 空间物理 1
红外基础研究 1

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