分面浏览：发表日期 |
| 当前检索式 | ((ALL：Etching mechanism)) |
| 限定条件 | 无 |
| 2023 1 | 2022 5 | 2021 4 |
| 2020 7 | 2019 20 | 2018 9 |
| 2017 21 | 2016 29 | 2015 20 |
| 2014 21 | 2013 21 | 2012 18 |
| 2011 15 | 2010 33 | 2009 11 |
| 2008 13 | 2007 5 | 2006 16 |
| 2005 7 | 2004 3 | 2003 4 |
| 2002 3 | 2001 5 | 2000 2 |
| 1999 2 | 1998 4 | 1996 1 |
| 1995 1 | 1993 4 | 1991 3 |
| 1990 2 | 1989 2 | 1988 5 |
| 1987 3 | 1986 3 | 1984 1 |
| 1983 1 |
