Broadband-reflecting optical thin films for the far ultraviolet spectral range

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	Broadband-reflecting optical thin films for the far ultraviolet spectral range
	Yang, Minghong 1,2; Zhou, Ciming 2; Jiang, Desheng 2; Shen, Lin 3
刊名	THIN SOLID FILMS
	2008-11-28
卷号	517 期号:2 页码:878-880
关键词	Broadband-reflecting coating Far ultraviolet Thin films Metal mirror
英文摘要	We discussed approaches to achieve broadband-reflecting optical thin film coatings for the far ultraviolet spectral region down to 50 nm. The basic strategy was to enhance aluminum coating capping with a bilayer in order to obtain broadband-reflecting optical coatings for this special region. By choosing material combinations and processes, highly-reflecting coatings covering from 110 nm down to 50 urn have been realized. Experimental results show that broadband highly reflective optical coatings with an average of 0.3 in reflectance in the spectral region of 60-110 nm have been achieved with the proposed Al/MgF2/SiC system. (C) 2008 Elsevier B.V. All rights reserved.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]	Materials Science ; Physics
关键词[WOS]	EXTREME-ULTRAVIOLET ; MULTILAYER COATINGS ; X-RAY ; CONSTANTS ; MIRRORS ; UV ; EXPOSURE ; ANGLES ; LIF ; NM
收录类别	SCI
语种	英语
WOS记录号	WOS:000261693900078
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3230]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany 2.Wuhan Univ Technol, Ctr Fiber Sensing, Wuhan 430071, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Yang, Minghong,Zhou, Ciming,Jiang, Desheng,et al. Broadband-reflecting optical thin films for the far ultraviolet spectral range[J]. THIN SOLID FILMS,2008,517(2):878-880.
APA	Yang, Minghong,Zhou, Ciming,Jiang, Desheng,&Shen, Lin.(2008).Broadband-reflecting optical thin films for the far ultraviolet spectral range.THIN SOLID FILMS,517(2),878-880.
MLA	Yang, Minghong,et al."Broadband-reflecting optical thin films for the far ultraviolet spectral range".THIN SOLID FILMS 517.2(2008):878-880.